High-Purity Fluoropolymers & SEMI F57

Convena Polymers supports the selection of high-purity fluoropolymers for ultrapure-water (UPW) and liquid-chemical distribution systems used in semiconductor manufacturing. We can provide grade- and batch-specific SEMI F57 test documentation for applicable materials on request.

High-purity fluoropolymers for semiconductor fluid handling

High-purity PFA and PTFE are used for tubing, valves, fittings, vessel and pipe linings, and other wetted components where chemical resistance, low extractables and reproducible material performance are critical. Material selection must be based on the actual grade, fabrication route, medium and operating conditions.

High-purity PFA

Melt-processable PFA for chemical-liquid tubing, sheet and valve linings. Discuss NEOFLON™ PFA and other suitable high-purity grades with our team.

View PFA grades and technical data

High-purity PTFE

PTFE for demanding semiconductor components, including paste-extruded tubing, compression-moulded components and other high-purity applications.

View PTFE grades and technical data

What “SEMI F57 tested” means

SEMI F57 is a specification for high-purity polymer materials and components used in UPW and liquid-chemical distribution systems. A SEMI F57 test claim applies only to the material grade, tested batch and test specimen identified in the relevant analytical report. It is not a blanket qualification for every grade in a product family or every finished component.

Specification and methods SEMI F57, supported by SEMI F40 for sample preparation and analytical procedures, and SEMI F104 for particle-contribution measurement.
UPW extraction Sample exposure in ultrapure water at +85 °C for 168 hours (7 days).
Trace metallic contamination Leachable metals: 22 elements, including Fe, Cu, Ni, Zn, Na and Ca; stated limit ≤ 5 µg/m².
Ionic contamination Leachable anions and cations: eight ion species, including F⁻, Cl⁻, NO₃⁻ and SO₄²⁻.
Other reported criteria Total organic carbon (TOC), particle contribution to UPW and wetted-surface roughness (Ra).

Grade families for report review

Polymer Grade families for report review
PFA Chemours Teflon™ PFA 440HP, 450HP and 951HP Plus; Daikin NEOFLON™ PFA AP-231SH and AP-230HP; Solvay Hyflon® PFA P7010 and M620
PTFE Dyneon™ / 3M PTFE TF 1610, TFM 1600 and TFM 1705G; selected Gore / Chemours high-purity PTFE grades
PVDF Arkema Kynar® 740, 1000 HD and UHM; Solvay Solef® 1010 and 6010
PP / HP-PP Selected Borealis / LyondellBasell high-purity PP-H grades for fluid systems

Documentation and qualification support

For the applicable tested material, an SEMI F57 compliance or analytical test report identifying the laboratory, test date, report number, tested grade and batch is available on request. Ask us for the current TDS, SDS, test information and documentation needed for your qualification process.

Frequently asked questions

Is PFA suitable for semiconductor applications?
High-purity PFA is widely used for semiconductor fluid handling because of its chemical resistance, melt processability and low-extractables potential. Final suitability depends on the specified grade, fabrication and qualification requirements.
Does Convena supply SEMI F57 tested materials?
Convena can provide information and applicable report documentation for specific tested grades and batches on request. Confirm the exact material, report scope and availability before selection.

Read the SEMI F57 portfolio update

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